High resistivity silicon-on-insulator substrate comprising a charge trapping layer formed by He-N2 co-implantation

ABSTRACT

A multilayer composite structure and a method of preparing a multilayer composite structure are provided. The multilayer composite structure comprises a semiconductor handle substrate having a minimum bulk region resistivity of at least about 500 ohm-cm and comprises a region of nitrogen-reacted nanovoids in the front surface region; a silicon dioxide layer on the surface of the semiconductor handle substrate; a dielectric layer in contact with the silicon dioxide layer; and a semiconductor device layer in contact with the dielectric layer.

CROSS-REFERENCE TO RELATED APPLICATION

This application is a National Stage application of InternationalApplication No. PCT/US2015/060885, filed on Nov. 16, 2015. InternationalApplication No. PCT/US2015/060885 claims priority to U.S. provisionalpatent application Ser. No. 62/081,362 filed on Nov. 18, 2014. Thedisclosure of both priority documents are hereby incorporated byreference as if set forth in their entirety.

FIELD OF THE INVENTION

The present invention generally relates to the field of semiconductorwafer manufacture. More specifically, the present invention relates to amethod of preparing a handle substrate for use in the manufacture of asemiconductor-on-insulator (e.g., silicon-on-insulator) structure, andmore particularly to a method for producing a charge trapping layer inthe handle wafer of the semiconductor-on-insulator structure.

BACKGROUND OF THE INVENTION

Semiconductor wafers are generally prepared from a single crystal ingot(e.g., a silicon ingot) which is trimmed and ground to have one or moreflats or notches for proper orientation of the wafer in subsequentprocedures. The ingot is then sliced into individual wafers. Whilereference will be made herein to semiconductor wafers constructed fromsilicon, other materials may be used to prepare semiconductor wafers,such as germanium, silicon carbide, silicon germanium, or galliumarsenide.

Semiconductor wafers (e.g., silicon wafers) may be utilized in thepreparation of composite layer structures. A composite layer structure(e.g., a semiconductor-on-insulator, and more specifically, asilicon-on-insulator (SOI) structure) generally comprises a handle waferor layer, a device layer, and an insulating (i.e., dielectric) film(typically an oxide layer) between the handle layer and the devicelayer. Generally, the device layer is between 0.01 and 20 micrometersthick, such as between 0.05 and 20 micrometers thick. In general,composite layer structures, such as silicon-on-insulator (SOI),silicon-on-sapphire (SOS), and silicon-on-quartz, are produced byplacing two wafers in intimate contact, followed by a thermal treatmentto strengthen the bond.

After thermal anneal, the bonded structure undergoes further processingto remove a substantial portion of the donor wafer to achieve layertransfer. For example, wafer thinning techniques, e.g., etching orgrinding, may be used, often referred to as back etch SOI (i.e., BESOI),wherein a silicon wafer is bound to the handle wafer and then slowlyetched away until only a thin layer of silicon on the handle waferremains. See, e.g., U.S. Pat. No. 5,189,500, the disclosure of which isincorporated herein by reference as if set forth in its entirety. Thismethod is time-consuming and costly, wastes one of the substrates, andgenerally does not have suitable thickness uniformity for layers thinnerthan a few microns.

Another common method of achieving layer transfer utilizes a hydrogenimplant followed by thermally induced layer splitting. Particles (e.g.,hydrogen atoms or a combination of hydrogen and helium atoms) areimplanted at a specified depth beneath the front surface of the donorwafer. The implanted particles form a cleave plane in the donor wafer atthe specified depth at which they were implanted. The surface of thedonor wafer is cleaned to remove organic compounds deposited on thewafer during the implantation process.

The front surface of the donor wafer is then bonded to a handle wafer toform a bonded wafer through a hydrophilic bonding process. Prior tobonding, the donor wafer and/or handle wafer are activated by exposingthe surfaces of the wafers to plasma containing, for example, oxygen ornitrogen. Exposure to the plasma modifies the structure of the surfacesin a process often referred to as surface activation, which activationprocess renders the surfaces of one or both of the donor water andhandle wafer hydrophilic. The wafers are then pressed together, and abond is formed there between. This bond is relatively weak, and must bestrengthened before further processing can occur.

In some processes, the hydrophilic bond between the donor wafer andhandle wafer (i.e., a bonded wafer) is strengthened by heating orannealing the bonded wafer pair. In some processes, wafer bonding mayoccur at low temperatures, such as between approximately 300° C. and500° C. In some processes, wafer bonding may occur at high temperatures,such as between approximately 800° C. and 1100° C. The elevatedtemperatures cause the formation of covalent bonds between the adjoiningsurfaces of the donor wafer and the handle wafer, thus solidifying thebond between the donor wafer and the handle wafer. Concurrently with theheating or annealing of the bonded wafer, the particles earlierimplanted in the donor wafer weaken the cleave plane.

A portion of the donor wafer is then separated (i.e., cleaved) along thecleave plane from the bonded wafer to form the SOI wafer. Cleaving maybe carried out by placing the bonded wafer in a fixture in whichmechanical force is applied perpendicular to the opposing sides of thebonded wafer in order to pull a portion of the donor wafer apart fromthe bonded wafer. According to some methods, suction cups are utilizedto apply the mechanical force. The separation of the portion of thedonor wafer is initiated by applying a mechanical wedge at the edge ofthe bonded wafer at the cleave plane in order to initiate propagation ofa crack along the cleave plane. The mechanical force applied by thesuction cups then pulls the portion of the donor wafer from the bondedwafer, thus forming an SOI wafer.

According to other methods, the bonded pair may instead be subjected toan elevated temperature over a period of time to separate the portion ofthe donor wafer from the bonded wafer. Exposure to the elevatedtemperature causes initiation and propagation of a crack along thecleave plane, thus separating a portion of the donor wafer. This methodallows for better uniformity of the transferred layer and allows recycleof the donor wafer, but typically requires heating the implanted andbonded pair to temperatures approaching 500° C.

The use of high resistivity semiconductor-on-insulator (e.g.,silicon-on-insulator) wafers for RF related devices such as antennaswitches offers benefits over traditional substrates in terms of costand integration. To reduce parasitic power loss and minimize harmonicdistortion inherent when using conductive substrates for high frequencyapplications it is necessary, but not sufficient, to use substratewafers with a high resistivity. Accordingly, the resistivity of thehandle wafer for an RF device is generally greater than about 500Ohm-cm. With reference now to FIG. 1, a silicon on insulator structure 2comprising a very high resistivity silicon wafer 4, a buried oxide (BOX)layer 6, and a silicon device layer 10. Such a substrate is prone toformation of high conductivity charge inversion or accumulation layers12 at the BOX/handle interface causing generation of free carriers(electrons or holes), which reduce the effective resistivity of thesubstrate and give rise to parasitic power losses and devicenonlinearity when the devices are operated at RF frequencies. Theseinversion/accumulation layers can be due to BOX fixed charge, oxidetrapped charge, interface trapped charge, and even DC bias applied tothe devices themselves.

A method is required therefore to trap the charge in any inducedinversion or accumulation layers so that the high resistivity of thesubstrate is maintained even in the very near surface region. It isknown that charge trapping layers (CTL) between the high resistivityhandle substrates and the buried oxide (BOX) may improve the performanceof RF devices fabricated using SOI wafers. A number of methods have beensuggested to form these high interface trap layers. For example, withreference now to FIG. 2, one method of creating asemiconductor-on-insulator structure 20 (e.g., a silicon-on-insulator,or SOI) with a CTL for RF device applications is based on depositing anundoped polycrystalline silicon film 28 on a silicon substrate havinghigh resistivity 22 and then forming a stack of oxide 24 and top siliconlayer 26 on it. A polycrystalline silicon layer 28 acts as a highdefectivity layer between the silicon substrate 22 and the buried oxidelayer 24. See FIG. 2, which depicts a polycrystalline silicon film foruse as a charge trapping layer 28 between a high resistivity substrate22 and the buried oxide layer 24 in a silicon-on-insulator structure 20.An alternative method is the implantation of heavy ions to create a nearsurface damage layer. Devices, such as radiofrequency devices, are builtin the top silicon layer 26.

It has been shown in academic studies that the polycrystalline siliconlayer in between of the oxide and substrate improves the deviceisolation, decreases transmission line losses and reduces harmonicdistortions. See, for example: H. S. Gamble, et al. “Low-loss CPW lineson surface stabilized high resistivity silicon,” Microwave Guided WaveLett., 9(10), pp. 395-397, 1999; D. Lederer, R. Lobet and J.-P. Raskin,“Enhanced high resistivity SOI wafers for RF applications,” IEEE Intl.SOI Conf, pp. 46-47, 2004; D. Lederer and J.-P. Raskin, “New substratepassivation method dedicated to high resistivity SOI wafer fabricationwith increased substrate resistivity,” IEEE Electron Device Letters,vol. 26, no. 11, pp. 805-807, 2005; D. Lederer, B. Aspar, C. Laghaé andJ.-P. Raskin, “Performance of RF passive structures and SOI MOSFETstransferred on a passivated HR SOI substrate,” IEEE International SOIConference, pp. 29-30, 2006; and Daniel C. Kerr et al. “Identificationof RF harmonic distortion on Si substrates and its reduction using atrap-rich layer”, Silicon Monolithic Integrated Circuits in RF Systems,2008. SiRF 2008 (IEEE Topical Meeting), pp. 151-154, 2008.

SUMMARY OF THE INVENTION

The present invention is directed to a multilayer structure comprising:a single crystal semiconductor handle substrate comprising two major,generally parallel surfaces, one of which is a front surface of thesingle crystal semiconductor handle substrate and the other of which isa back surface of the single crystal semiconductor handle substrate, acircumferential edge joining the front and back surfaces of the singlecrystal semiconductor handle substrate, a central plane between thefront surface and the back surface of the single crystal semiconductorhandle substrate, a front surface region having a depth, D, as measuredfrom the front surface and toward the central plane, and a bulk regionbetween the front and back surfaces of the single crystal semiconductorhandle substrate, wherein the single crystal semiconductor handlesubstrate has a minimum bulk region resistivity of at least about 500ohm-cm and the front surface region comprises nitrogen-reactednanovoids; a dielectric layer in contact with the front surface of thesingle crystal semiconductor handle substrate; and a single crystalsemiconductor device layer in contact with the dielectric layer.

The present invention is further directed to a method of forming amultilayer structure. The method comprises oxidizing a front surface ofa single crystal semiconductor handle substrate to thereby prepare asemiconductor oxide layer having a thickness, D1, wherein the singlecrystal semiconductor handle substrate comprises two major, generallyparallel surfaces, one of which is the front surface of the singlecrystal semiconductor handle substrate and the other of which is a backsurface of the single crystal semiconductor handle substrate, acircumferential edge joining the front and back surfaces of the singlecrystal semiconductor handle substrate, a central plane between thefront surface and the back surface of the single crystal semiconductorhandle substrate, a front surface region having a depth, D, as measuredfrom the front surface and toward the central plane, and a bulk regionbetween the front and back surfaces of the single crystal semiconductorhandle substrate, wherein the single crystal semiconductor handlesubstrate has a minimum bulk region resistivity of at least about 500ohm-cm; implanting He through the semiconductor oxide and the frontsurface of the single crystal semiconductor handle substrate to form animplant plane having a peak depth, D2, as measured from the frontsurface of the single crystal semiconductor substrate toward the centralplane; implanting N₂ through the semiconductor oxide and the frontsurface of the single crystal semiconductor handle substrate to form animplant plane having a peak depth, D3, as measured from the frontsurface of the single crystal semiconductor substrate toward the centralplane; heating the He and N₂ implanted single crystal semiconductorhandle substrate at a temperature and a duration sufficient toout-diffuse He and thereby yield nanovoids in the front surface regionof the single crystal semiconductor handle substrate; and bonding adielectric layer on a front surface of a single crystal semiconductordonor substrate to the semiconductor oxide layer of the single crystalsemiconductor handle substrate to thereby form a bonded structure,wherein the single crystal semiconductor donor substrate comprises twomajor, generally parallel surfaces, one of which is the front surface ofthe semiconductor donor substrate and the other of which is a backsurface of the semiconductor donor substrate, a circumferential edgejoining the front and back surfaces of the semiconductor donorsubstrate, and a central plane between the front and back surfaces ofthe semiconductor donor substrate, and further wherein the front surfaceof the semiconductor donor substrate comprises the dielectric layer.

Other objects and features will be in part apparent and in part pointedout hereinafter.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 is a depiction of a silicon-on-insulator wafer comprising a highresistivity substrate and a buried oxide layer.

FIG. 2 is a depiction of a silicon-on-insulator wafer according to theprior art, the SOI wafer comprising a polysilicon charge trapping layerbetween a high resistivity substrate and a buried oxide layer.

FIGS. 3A through 3D depict process steps according to the method of thepresent invention.

DETAILED DESCRIPTION OF THE EMBODIMENT(S) OF THE INVENTION

According to the present invention, a method is provided for preparing asemiconductor-on-insulator composite structure comprising a chargetrapping layer (CTL). The present invention is further directed to asemiconductor-on-insulator composite structure comprising a chargetrapping layer (CTL). In some embodiments, thesemiconductor-on-insulator (e.g., silicon-on-insulator) comprises a highresistivity handle substrate prepared by He—N₂ co-implantation and heattreatment to thereby form the charge trapping layer comprising a regionof nanovoids. It has been discovered that a charge trapping layerprepared by He—N₂ co-implantation and heat treatment, and thus havingnanovoids, may suppress the parasitic conduction phenomenon in HR-SOIwafers for RF applications. Co-implantation of He and N₂ followed by aheat treatment creates nanometer-size voids at the BOX/handle interfacethat are electrically activated deep level traps. He implantationfollowed by heat treatment causes He out-diffusion, which thereby formsnanovoids in the single crystal semiconductor (e.g. single crystalsilicon) handle substrate. Nitrogen is co-implanted since nitrogenreacts with these voids and forms deep level trap states. With thismethod, there should be little or no surface roughening of the handlewafer, which reduces or eliminates the requirement for chemicalmechanical polishing (CMP) prior to bonding.

According to the method of the present invention, in general, a highresistivity handle substrate (e.g., a silicon wafer having aresistivity>1 kΩ·cm) is processed in a vertical furnace to growsemiconductor oxide (e.g., silicon dioxide). After the oxidation, He andN₂ are implanted through the semiconductor oxide (e.g., silicon dioxide)and through the front surface of the handle substrate into a frontsurface region of the substrate (e.g., a silicon wafer having aresistivity>1 kΩ·cm). The implant depth is a little bit more than thethickness of the semiconductor oxide (e.g., silicon dioxide) so that theCTL forms in the front surface region of the handle substrate at theoxide/handle interface later. After the implantation, the wafer isthermal treated to let He out-diffused. After He is out-diffused, voidswill be left in the front surface region at the oxide/handle interface.A conventional donor wafer can then be bonded to the handle substrateaccording to conventional methods. The semiconductor-on-insulator (e.g.,silicon-on-insulator) structure is then heat treated, cleaved, andpasses through multiple thermal processes to reach the end of line withstandard process flow.

The substrates for use in the present invention include a semiconductorhandle substrate, e.g., a single crystal semiconductor handle wafer anda semiconductor donor substrate, e.g., a single crystal semiconductordonor wafer. The semiconductor device layer in asemiconductor-on-insulator composite structure is derived from thesingle crystal semiconductor donor wafer. The semiconductor device layermay be transferred onto the semiconductor handle substrate by waferthinning techniques such as etching a semiconductor donor substrate orby cleaving a semiconductor donor substrate comprising a damage plane.In general, the single crystal semiconductor handle wafer and singlecrystal semiconductor donor wafer comprise two major, generally parallelsurfaces. One of the parallel surfaces is a front surface of thesubstrate, and the other parallel surface is a back surface of thesubstrate. The substrates comprise a circumferential edge joining thefront and back surfaces, and a central plane between the front and backsurfaces. The substrates additionally comprise an imaginary central axisperpendicular to the central plane and a radial length that extends fromthe central axis to the circumferential edge. In addition, becausesemiconductor substrates, e.g., silicon wafers, typically have sometotal thickness variation (TTV), warp, and bow, the midpoint betweenevery point on the front surface and every point on the back surface maynot precisely fall within a plane. As a practical matter, however, theTTV, warp, and bow are typically so slight that to a close approximationthe midpoints can be said to fall within an imaginary central planewhich is approximately equidistant between the front and back surfaces.

Prior to any operation as described herein, the front surface and theback surface of the substrate may be substantially identical. A surfaceis referred to as a “front surface” or a “back surface” merely forconvenience and generally to distinguish the surface upon which theoperations of method of the present invention are performed. In thecontext of the present invention, a “front surface” of a single crystalsemiconductor handle substrate, e.g., a single crystal silicon handlewafer, refers to the major surface of the substrate that becomes aninterior surface of the bonded structure. It is through this frontsurface that the He and N₂ are implanted into a front surface region ofthe single crystal semiconductor handle substrate. The front surfaceregion of the single crystal semiconductor handle substrate may bedefined by a depth, D, which is measured perpendicularly from the frontsurface of the substrate toward the central plane. In general, thedepth, D, of the front surface region is less than about 1000nanometers, such as less than about 500 nanometers, such as less thanabout 400 nanometers, or even less than about 300 nanometers. A “backsurface” of a single crystal semiconductor handle substrate, e.g., ahandle wafer, refers to the major surface that becomes an exteriorsurface of the bonded structure. Similarly, a “front surface” of asingle crystal semiconductor donor substrate, e.g., a single crystalsilicon donor wafer, refers to the major surface of the single crystalsemiconductor donor substrate that becomes an interior surface of thebonded structure. The front surface of a single crystal semiconductordonor substrate often comprises a dielectric layer, e.g., a silicondioxide layer, which forms the buried oxide (BOX) layer in the finalstructure. A “back surface” of a single crystal semiconductor donorsubstrate, e.g., a single crystal silicon donor wafer, refers to themajor surface that becomes an exterior surface of the bonded structure.Upon completion of conventional bonding and wafer thinning steps, thesingle crystal semiconductor donor substrate forms the semiconductordevice layer of the semiconductor-on-insulator (e.g.,silicon-on-insulator) composite structure.

The single crystal semiconductor handle substrate and the single crystalsemiconductor donor substrate may be single crystal semiconductorwafers. In preferred embodiments, the semiconductor wafers comprise amaterial selected from the group consisting of silicon, silicon carbide,silicon germanium, gallium arsenide, gallium nitride, indium phosphide,indium gallium arsenide, germanium, and combinations thereof. The singlecrystal semiconductor wafers, e.g., the single crystal silicon handlewafer and single crystal silicon donor wafer, of the present inventiontypically have a nominal diameter of at least about 150 mm, at leastabout 200 mm, at least about 300 mm, or at least about 450 mm. Waferthicknesses may vary from about 250 micrometers to about 1500micrometers, such as between about 300 micrometers and about 1000micrometers, suitably within the range of about 500 micrometers to about1000 micrometers. In some specific embodiments, the wafer thickness maybe about 725 micrometers.

In particularly preferred embodiments, the single crystal semiconductorwafers comprise single crystal silicon wafers which have been slicedfrom a single crystal ingot grown in accordance with conventionalCzochralski crystal growing methods or float zone growing methods. Suchmethods, as well as standard silicon slicing, lapping, etching, andpolishing techniques are disclosed, for example, in F. Shimura,Semiconductor Silicon Crystal Technology, Academic Press, 1989, andSilicon Chemical Etching, (J. Grabmaier ed.) Springer-Verlag, N.Y., 1982(incorporated herein by reference). Preferably, the wafers are polishedand cleaned by standard methods known to those skilled in the art. See,for example, W. C. O'Mara et al., Handbook of Semiconductor SiliconTechnology, Noyes Publications. If desired, the wafers can be cleaned,for example, in a standard SC1/SC2 solution. In some embodiments, thesingle crystal silicon wafers of the present invention are singlecrystal silicon wafers which have been sliced from a single crystalingot grown in accordance with conventional Czochralski (“Cz”) crystalgrowing methods, typically having a nominal diameter of at least about150 mm, at least about 200 mm, at least about 300 mm, or at least about450 mm. Preferably, both the single crystal silicon handle wafer and thesingle crystal silicon donor wafer have mirror-polished front surfacefinishes that are free from surface defects, such as scratches, largeparticles, etc. Wafer thickness may vary from about 250 micrometers toabout 1500 micrometers, such as between about 300 micrometers and about1000 micrometers, suitably within the range of about 500 micrometers toabout 1000 micrometers. In some specific embodiments, the waferthickness may be about 725 micrometers.

In some embodiments, the single crystal semiconductor wafers, i.e.,handle wafer and donor wafer, comprise interstitial oxygen inconcentrations that are generally achieved by the Czochralski-growthmethod. In some embodiments, the semiconductor wafers comprise oxygen ina concentration between about 4 PPMA and about 18 PPMA. In someembodiments, the semiconductor wafers comprise oxygen in a concentrationbetween about 10 PPMA and about 35 PPMA. Interstitial oxygen may bemeasured according to SEMI MF 1188-1105.

In some embodiments, the semiconductor handle substrate, e.g., a singlecrystal semiconductor handle substrate, such as a single crystal siliconhandle wafer, has a relatively high minimum bulk resistivity. Highresistivity wafers are generally sliced from single crystal ingots grownby the Czochralski method or float zone method. Cz-grown silicon wafersmay be subjected to a thermal anneal at a temperature ranging from about600° C. to about 1000° C. in order to annihilate thermal donors causedby oxygen that are incorporated during crystal growth. In someembodiments, the single crystal semiconductor handle wafer has a minimumbulk resistivity of at least 100 Ohm-cm, such as between about 100Ohm-cm and about 100,000 Ohm-cm, or between about 500 Ohm-cm and about100,000 Ohm-cm, or between about 1000 Ohm-cm and about 100,000 Ohm-cm,or between about 500 Ohm-cm and about 10,000 Ohm-cm, or between about750 Ohm-cm and about 10,000 Ohm-cm, between about 1000 Ohm-cm and about10,000 Ohm-cm, between about 2000 Ohm-cm and about 10,000 Ohm-cm,between about 3000 Ohm-cm and about 10,000 Ohm-cm, or between about 3000Ohm cm and about 5,000 Ohm-cm. Methods for preparing high resistivitywafers are known in the art, and such high resistivity wafers may beobtained from commercial suppliers, such as SunEdison Semiconductor Ltd.(St. Peters, Mo.; formerly MEMC Electronic Materials, Inc.).

In some embodiments and with reference to FIGS. 3A through 3D, the frontsurface of the semiconductor handle wafer 102 (e.g., a silicon wafer) isoxidized to form a semiconductor oxide layer 104 (e.g., a silicondioxide layer) on the front surface of the semiconductor handle wafer102 in a first step for preparing a semiconductor-on-insulator structure(e.g., silicon-on-insulator) 100 comprising a single crystalsemiconductor handle substrate 102, a semiconductor oxide (e.g., silicondioxide) layer 104, and a single crystal semiconductor device layer 108.In order to form a semiconductor oxide layer 104 (e.g., a silicondioxide layer), the front surface of the semiconductor handle wafer 102is oxidized prior to implantation such that the He and N₂ are implantedthrough the semiconductor oxide layer 104 (e.g., a silicon dioxidelayer). This may be accomplished by means known in the art, such asthermal oxidation (in which some portion of the deposited semiconductormaterial film will be consumed) or CVD oxide deposition. In someembodiments, the single crystal semiconductor handle substrate, e.g., asingle crystal silicon handle wafer, may be thermally oxidized in afurnace such as an ASM A400. The temperature may range from 750° C. to1200° C. in an oxidizing ambient. The oxidizing ambient atmosphere canbe a mixture of inert gas, such as Ar or N₂, and O₂. The oxygen contentmay vary from 1 to 10 percent, or higher. In some embodiments, theoxidizing ambient atmosphere may be up to 100% (a “dry oxidation”). Inan exemplary embodiment, semiconductor handle wafer 102 may be loadedinto a vertical furnace, such as an A400. The temperature is ramped tothe oxidizing temperature with a mixture of N₂ and O₂. After the desiredoxide thickness has been obtained, the O₂ is turned off and the furnacetemperature is reduced and wafers are unloaded from the furnace. In someembodiments, the semiconductor oxide layer 104 (e.g., a silicon dioxidelayer), is formed on the front surface of the single crystalsemiconductor handle substrate 102 to an average depth D1 between about10 nanometers and about 5000 nanometers, such as between about 100nanometers and about 1000 nanometers, or between about 200 nanometersand about 400 nanometers.

In some embodiments of the invention, and with reference to FIGS. 3A-3D,a method is provided for preparing a semiconductor-on-insulatorstructure (e.g., silicon-on-insulator) 100 comprising a single crystalsemiconductor handle substrate 102, a semiconductor oxide layer 104(e.g., a silicon dioxide layer), and a single crystal semiconductordevice layer 108. The single crystal semiconductor handle substrate 102comprises a high resistivity single crystal semiconductor wafer. Forreference (and not to scale), a dashed line is provided in FIG. 3A andmarked by the depth, D, which defines the front surface region of thesingle crystal semiconductor handle substrate 102. A semiconductor oxidelayer 104 (e.g., a silicon dioxide layer) is formed on the front surfaceof the single crystal semiconductor handle substrate 102 as describedabove. With reference to FIG. 3B, He and N₂ are implanted through thefront surface of the semiconductor oxide layer 104 (e.g., a silicondioxide layer) to depths D2 and D3 just greater than the thickness ofthe semiconductor oxide layer 104 (e.g., a silicon dioxide layer). Thepeak depth of He implantation may be denoted D2, and the peak depth of Nimplantation may be denoted D3. According to the method of the presentinvention, He is implanted through the front surface of thesemiconductor oxide layer 104 (e.g., a silicon dioxide layer) to form animplant plane having a peak depth of He, D2, as measured from the frontsurface of the single crystal semiconductor substrate toward the centralplane. According to the method of the present invention, N₂ is implantedthrough the front surface of the semiconductor oxide layer 104 (e.g., asilicon dioxide layer) to form an implant plane having a peak depth ofN₂, D3, as measured from the front surface of the single crystalsemiconductor substrate toward the central plane. According to someembodiments, He is implanted simultaneously with N₂. In someembodiments, He is implanted prior to N₂ implantation. In someembodiments, N₂ is implanted prior to He implantation. Preferably, thepeak depths D2 and D3 are essentially equivalent to the thickness, D1,of the semiconductor oxide layer 104 (e.g., a silicon dioxide layer).That is, if a semiconductor oxide layer, e.g., a silicon dioxide layer,is grown to a depth of 300 nanometers, the peak depth of He and N₂implantation is about 300 nanometers. In some embodiments, the peakdepth D2 may be between about 10 nanometers and about 5000 nanometers,such as between about 100 nanometers and about 1000 nanometers, orbetween about 200 nanometers and about 400 nanometers, with the depthscorresponding to the thickness, D1, of the semiconductor oxide layer. Insome embodiments, the peak depth D3 may be between about 10 nanometersand about 5000 nanometers, such as between about 100 nanometers andabout 1000 nanometers, or between about 200 nanometers and about 400nanometers, with the depths corresponding to the thickness, D1, of thesemiconductor oxide layer.

Ion implantation may be carried out in a commercially availableinstrument, such as an Applied Materials Quantum II. Ion implantation iscarried out at a density and energy sufficient to implant He and N2through the thickness, D1, of the semiconductor oxide layer 104 (e.g., asilicon dioxide layer) and into the front surface region (defined bydepth, D) of the single crystal semiconductor handle substrate 102. HeImplant density may range from about 1×10¹⁴ ions/cm² to about 1×10¹⁷ions/cm², such as from about 1×10¹⁵ ions/cm² to about 6×10¹⁶ ions/cm².He implant energies may range from about 1 keV to about 3,000 keV, suchas from about 50 keV to about 1,000 keV. N₂ implant density may rangefrom about 1×10¹² ions/cm² to about 1×10¹⁹ ions/cm², such as from about1×10¹³ ions/cm² to about 1×10¹⁸ ions/cm². N₂ implant energies may rangefrom about 1 keV to about 3,000 keV, such as from about 80 keV to about1,000 keV. In some embodiments it may be desirable to subject the singlecrystal semiconductor handle substrate 102, e.g., single crystal siliconhandle wafer, to a clean after the implant. In some preferredembodiments, the clean could include a Piranha clean followed by a DIwater rinse and SC1/SC2 cleans.

With reference to FIG. 3C, after ion implantation, the He and N₂implanted single crystal semiconductor handle substrate 102 having asemiconductor oxide layer 104 (e.g., a silicon dioxide layer) issubjected to a thermal anneal to out-diffuse He and thereby leave aregion of nitrogen-reacted nanovoids 106 near the interface of the highresistivity single crystal semiconductor handle substrate 102 and thesemiconductor oxide layer 104 (e.g., a silicon dioxide layer). Aconventional furnace, such as an ASM A 400, may be used for the thermalanneal. The temperature of the thermal anneal may range from about 700°C. to about 1200° C., and the duration may range from about 10 minutesto about 2 hours, such as between about 10 minutes and about 1 hour. Heimplantation followed by heat treatment causes He out-diffusion, whichthereby forms a region of nanovoids 106 at the interface of the highresistivity single crystal semiconductor handle substrate 102 and thesemiconductor oxide layer 104 (e.g., a silicon dioxide layer). Nitrogenis co-implanted since nitrogen reacts with these voids and forms deeplevel trap states. The concentration, i.e., surface density, ofnanovoids at or near the oxide interface is preferably at least about1×10¹² nanovoids/cm² in order to efficiently trap charges, preferably atleast about 1×10¹³ nanovoids/cm² or even at least about 1×10¹⁴nanovoids/cm². In some embodiments, the nanovoid region 106 comprisesnanovoids at a surface density between about 1×10¹² nitrogen-reactednanovoids/cm² and about 1×10¹⁵ nitrogen-reacted nanovoids/cm². In someembodiments, the nanovoid region 106 comprises nanovoids at a surfacedensity between about 1×10¹³ nitrogen-reacted nanovoids/cm² and about1×10¹⁵ nitrogen-reacted nanovoids/cm². The nanovoid region 106 isgenerally a few nanometers thick, such as between 1 nanometer and about1000 nanometers, or between about 10 nanometers and about 500nanometers. A nanovoid region 106 having this density of nitrogenreacted nanovoids is sufficient to effectively trap charge.

After ion implantation and thermal treatment, wafer cleaning isoptional. If desired, the wafers can be cleaned, for example, in astandard SC1/SC2 solution.

The high resistivity single crystal semiconductor handle substrate 102,e.g. a single crystal semiconductor handle wafer such as a singlecrystal silicon handle wafer, prepared according to the method describedherein comprising a nanovoid region 106 in the front surface region ofthe high resistivity single crystal semiconductor handle substrate 102,and, optionally, an oxide film, is next bonded a semiconductor donorsubstrate, e.g., a single crystal semiconductor donor wafer, which isprepared according to conventional layer transfer methods. The singlecrystal semiconductor donor substrate may be single crystalsemiconductor wafers. In preferred embodiments, the semiconductor waferscomprise a material selected from the group consisting of silicon,silicon carbide, silicon germanium, gallium arsenide, gallium nitride,indium phosphide, indium gallium arsenide, germanium, and combinationsthereof. Depending upon the desired properties of the final integratedcircuit device, the single crystal semiconductor (e.g., silicon) donorwafer may comprise a dopant selected from the group consisting of boron,arsenic, and phosphorus. The resistivity of the single crystalsemiconductor (e.g., silicon) donor wafer may range from 1 to 50 Ohm-cm,typically, from 5 to 25 Ohm-cm. The single crystal semiconductor donorwafer may be subjected to standard process steps including oxidation,implant, and post implant cleaning. Accordingly, a semiconductor donorsubstrate, such as a single crystal semiconductor wafer of a materialthat is conventionally used in preparation of multilayer semiconductorstructures, e.g., a single crystal silicon donor wafer, that has beenetched and polished and optionally oxidized, is subjected to ionimplantation to form a damage layer in the donor substrate.

In some embodiments, the semiconductor donor substrate comprises adielectric layer. Suitable dielectric layers may comprise a materialselected from among silicon dioxide, silicon nitride, hafnium oxide,titanium oxide, zirconium oxide, lanthanum oxide, barium oxide, and acombination thereof. In some embodiments, the dielectric layer comprisesan oxide layer having a thickness of at least about 10 nanometer thick,such as between about 10 nanometers and about 10,000 nanometers, betweenabout 10 nanometers and about 5,000 nanometers, or between about 100nanometers and about 400 nanometers.

In some embodiments, the front surface of the single crystalsemiconductor donor substrate (e.g., a single crystal silicon donorsubstrate) may be thermally oxidized (in which some portion of thedeposited semiconductor material film will be consumed) to prepare thesemiconductor oxide film, or the semiconductor oxide (e.g., silicondioxide) film may be grown by CVD oxide deposition. In some embodiments,the front surface of the single crystal semiconductor donor substratemay be thermally oxidized in a furnace such as an ASM A400 in the samemanner described above. In some embodiments, the donor substrates areoxidized to provide an oxide layer on the front surface layer of atleast about 10 nanometer thick, such as between about 10 nanometers andabout 10,000 nanometers, between about 10 nanometers and about 5,000nanometers, or between about 100 nanometers and about 400 nanometers.

Ion implantation may be carried out in a commercially availableinstrument, such as an Applied Materials Quantum II. Implanted ionsinclude He, H, H₂, or combinations thereof. Ion implantation is carriedout as a density and duration sufficient to form a damage layer in thesemiconductor donor substrate. Implant density may range from about 10¹²ions/cm² to about 10¹⁷ ions/cm², such as from about 10¹⁴ ions/cm² toabout 10¹⁷ ions/cm². Implant energies may range from about 1 keV toabout 3,000 keV, such as from about 10 keV to about 3,000 keV. In someembodiments it may be desirable to subject the single crystalsemiconductor donor wafers, e.g., single crystal silicon donor wafers,to a clean after the implant. In some preferred embodiments, the cleancould include a Piranha clean followed by a DI water rinse and SC1/SC2cleans.

In some embodiments of the present invention, the single crystalsemiconductor donor substrate having an ion implant region thereinformed by helium ion and/or hydrogen ion implant is annealed at atemperature sufficient to form a thermally activated cleave plane in thesingle crystal semiconductor donor substrate. An example of a suitabletool might be a simple Box furnace, such as a Blue M model. In somepreferred embodiments, the ion implanted single crystal semiconductordonor substrate is annealed at a temperature of from about 200° C. toabout 350° C., from about 225° C. to about 325° C., preferably about300° C. Thermal annealing may occur for a duration of from about 2 hoursto about 10 hours, such as from about 2 hours to about 8 hours. Thermalannealing within these temperatures ranges is sufficient to form athermally activated cleave plane. After the thermal anneal to activatethe cleave plane, the single crystal semiconductor donor substratesurface is preferably cleaned.

In some embodiments, the ion-implanted and optionally cleaned andoptionally annealed single crystal semiconductor donor substrate issubjected to oxygen plasma and/or nitrogen plasma surface activation. Insome embodiments, the oxygen plasma surface activation tool is acommercially available tool, such as those available from EV Group, suchas EVG®810LT Low Temp Plasma Activation System. The ion-implanted andoptionally cleaned single crystal semiconductor donor wafer is loadedinto the chamber. The chamber is evacuated and backfilled with O₂ to apressure less than atmospheric to thereby create the plasma. The singlecrystal semiconductor donor wafer is exposed to this plasma for thedesired time, which may range from about 1 second to about 120 seconds.Oxygen plasma surface oxidation is performed in order to render thefront surface of the single crystal semiconductor donor substratehydrophilic and amenable to bonding to a single crystal semiconductorhandle substrate prepared according to the method described above.

The hydrophilic front surface layer of the single crystal semiconductordonor substrate and the front surface of the single crystalsemiconductor handle substrate 102, which is optionally oxidized, arenext brought into intimate contact to thereby form a bonded structure.The bonded structure comprises a dielectric layer 104, e.g., a buriedoxide such as silicon oxide, with a portion of the dielectric layer 104contributed by the oxidized front surface of the single crystalsemiconductor handle substrate 102 and a portion of the dielectric layer104 contributed by the oxidized front surface of the single crystalsemiconductor donor substrate. In some embodiments, the dielectric layer104 comprises a buried oxide layer, such as a silicon oxide layer,having a thickness of at least about 10 nanometer thick, such as betweenabout 10 nanometers and about 10,000 nanometers, between about 10nanometers and about 5,000 nanometers, or between about 100 nanometersand about 400 nanometers.

Since the mechanical bond is relatively weak, the bonded structure isfurther annealed to solidify the bond between the donor wafer and thehandle wafer. In some embodiments of the present invention, the bondedstructure is annealed at a temperature sufficient to form a thermallyactivated cleave plane in the single crystal semiconductor donorsubstrate. An example of a suitable tool might be a simple Box furnace,such as a Blue M model. In some preferred embodiments, the bondedstructure is annealed at a temperature of from about 200° C. to about350° C., from about 225° C. to about 325° C., preferably about 300° C.Thermal annealing may occur for a duration of from about 0.5 hours toabout 10 hour, preferably a duration of about 2 hours. Thermal annealingwithin these temperatures ranges is sufficient to form a thermallyactivated cleave plane. After the thermal anneal to activate the cleaveplane, the bonded structure may be cleaved.

After the thermal anneal, the bond between the single crystalsemiconductor donor substrate and the single crystal semiconductorhandle substrate 102 is strong enough to initiate layer transfer viacleaving the bonded structure at the cleave plane. Cleaving may occuraccording to techniques known in the art. In some embodiments, thebonded structure may be placed in a conventional cleave station affixedto stationary suction cups on one side and affixed by additional suctioncups on a hinged arm on the other side. A crack is initiated near thesuction cup attachment and the movable arm pivots about the hingecleaving the wafer apart. Cleaving removes a portion of thesemiconductor donor wafer, thereby leaving a single crystalsemiconductor device layer 108, preferably a silicon device layer, onthe semiconductor-on-insulator composite structure 100. See FIG. 3D.

After cleaving, the cleaved structure may be subjected to a hightemperature anneal in order to further strengthen the bond between thetransferred device layer and the single crystal semiconductor handlesubstrate. An example of a suitable tool might be a vertical furnace,such as an ASM A400. In some preferred embodiments, the bonded structureis annealed at a temperature of from about 1000° C. to about 1200° C.,preferably at about 1000° C. Thermal annealing may occur for a durationof from about 0.5 hours to about 8 hours, preferably a duration of about4 hours. Thermal annealing within these temperatures ranges issufficient to strengthen the bond between the transferred device layerand the single crystal semiconductor handle substrate.

After the cleave and high temperature anneal, the bonded structure maybe subjected to a cleaning process designed to remove thin thermal oxideand clean particulates from the surface. In some embodiments, the singlecrystal semiconductor device layer 108 may be brought to the desiredthickness and smoothness by subjecting to a vapor phase HCl etch processin a horizontal flow single wafer epitaxial reactor using H₂ as acarrier gas. In some embodiments, an epitaxial layer may be deposited onthe transferred single crystal semiconductor device layer 108. Thefinished SOI wafer comprises the semiconductor handle substrate 102comprising a nanovoid region 106, the dielectric layer 104 (e.g., buriedoxide layer), and the semiconductor device layer 108, may then besubjected to end of line metrology inspections and cleaned a final timeusing typical SC1-SC2 process.

With reference to FIG. 3D, according to the present invention,semiconductor-on-insulator wafers (e.g., silicon-on-insulator) 100 areobtained comprising a high resistivity single crystal semiconductorhandle substrate 102, a semiconductor oxide (e.g., silicon dioxide)layer 104, and a single crystal semiconductor device layer (e.g.,silicon device layer) 108. A region of N₂-reacted nanovoids 106 isformed at the interface of the high resistivity single crystalsemiconductor handle substrate 102 and the semiconductor oxide (e.g.,silicon dioxide) layer 104. The nanometer-size voids at the interface ofthe high resistivity single crystal semiconductor handle substrate 102and the semiconductor oxide (e.g., silicon dioxide) layer 104 areelectrically activated deep level traps.

Having described the invention in detail, it will be apparent thatmodifications and variations are possible without departing from thescope of the invention defined in the appended claims.

When introducing elements of the present invention or the preferredembodiments(s) thereof, the articles “a”, “an”, “the” and “said” areintended to mean that there are one or more of the elements. The terms“comprising”, “including” and “having” are intended to be inclusive andmean that there may be additional elements other than the listedelements.

In view of the above, it will be seen that the several objects of theinvention are achieved and other advantageous results attained.

As various changes could be made in the above products and methodswithout departing from the scope of the invention, it is intended thatall matter contained in the above description and shown in theaccompanying drawings shall be interpreted as illustrative and not in alimiting sense.

What is claimed is:
 1. A method of forming a multilayer structure, themethod comprising: oxidizing a front surface of a single crystalsemiconductor handle substrate to thereby prepare a semiconductor oxidelayer having a thickness, D1, wherein the single crystal semiconductorhandle substrate comprises two major, generally parallel surfaces, oneof which is the front surface of the single crystal semiconductor handlesubstrate and the other of which is a back surface of the single crystalsemiconductor handle substrate, a circumferential edge joining the frontand back surfaces of the single crystal semiconductor handle substrate,a central plane between the front surface and the back surface of thesingle crystal semiconductor handle substrate, a front surface regionhaving a depth, D, as measured from the front surface and toward thecentral plane, and a bulk region between the front and back surfaces ofthe single crystal semiconductor handle substrate, wherein the singlecrystal semiconductor handle substrate has a minimum bulk regionresistivity of at least about 500 ohm-cm; implanting He through thesemiconductor oxide and the front surface of the single crystalsemiconductor handle substrate to form an implant plane having a peakdepth, D2, as measured from the front surface of the single crystalsemiconductor substrate toward the central plane; implanting N₂ throughthe semiconductor oxide and the front surface of the single crystalsemiconductor handle substrate to form an implant plane having a peakdepth, D3, as measured from the front surface of the single crystalsemiconductor substrate toward the central plane; heating the He and N₂implanted single crystal semiconductor handle substrate at a temperatureand a duration sufficient to out-diffuse He and thereby yield nanovoidsin the front surface region of the single crystal semiconductor handlesubstrate; and bonding a dielectric layer on a front surface of a singlecrystal semiconductor donor substrate to the semiconductor oxide layerof the single crystal semiconductor handle substrate to thereby form abonded structure, wherein the single crystal semiconductor donorsubstrate comprises two major, generally parallel surfaces, one of whichis the front surface of the semiconductor donor substrate and the otherof which is a back surface of the semiconductor donor substrate, acircumferential edge joining the front and back surfaces of thesemiconductor donor substrate, and a central plane between the front andback surfaces of the semiconductor donor substrate, and further whereinthe front surface of the semiconductor donor substrate comprises thedielectric layer.
 2. The method of claim 1 wherein the single crystalsemiconductor handle substrate comprises silicon, and the semiconductoroxide comprises silicon dioxide.
 3. The method of claim 1 wherein thesingle crystal semiconductor handle substrate comprises a silicon wafersliced from a single crystal silicon ingot grown by the Czochralskimethod or the float zone method, and the semiconductor oxide comprisessilicon dioxide.
 4. The method of claim 1 wherein the single crystalsemiconductor handle substrate has a bulk resistivity between about 500Ohm-cm and about 100,000 Ohm-cm.
 5. The method of claim 1 wherein thesingle crystal semiconductor handle substrate has a bulk resistivitybetween about 1000 Ohm-cm and about 100,000 Ohm-cm.
 6. The method ofclaim 1 wherein the single crystal semiconductor handle substrate has abulk resistivity between about 1000 Ohm-cm and about 10,000 Ohm-cm. 7.The method of claim 1 wherein the single crystal semiconductor handlesubstrate has a bulk resistivity between about 2000 Ohm-cm and about10,000 Ohm-cm.
 8. The method of claim 1 wherein the single crystalsemiconductor handle substrate has a bulk resistivity between about 3000Ohm-cm and about 10,000 Ohm-cm.
 9. The method of claim 1 wherein thesingle crystal semiconductor handle substrate has a bulk resistivitybetween about 3000 Ohm-cm and about 5,000 Ohm-cm.
 10. The method ofclaim 1 wherein the front surface region comprises nanovoids at asurface density of at least about 1×10¹² nitrogen-reacted nanovoids/cm².11. The method of claim 1 wherein the front surface region comprisesnanovoids at a surface density between about 1×10¹² nitrogen-reactednanovoids/cm² and about 1×10¹⁵ nitrogen-reacted nanovoids/cm².
 12. Themethod of claim 1 wherein the front surface region comprises nanovoidsat a surface density between about 1×10¹³ nitrogen-reacted nanovoids/cm²and about 1×10¹³ nitrogen-reacted nanovoids/cm².
 13. The method of claim1 wherein the single crystal semiconductor donor substrate comprises asilicon wafer sliced from a single crystal silicon ingot grown by theCzochralski method or the float zone method.
 14. The method of claim 1wherein the dielectric layer comprises a material selected from thegroup consisting of silicon dioxide, silicon nitride, hafnium oxide,titanium oxide, zirconium oxide, lanthanum oxide, barium oxide, and acombination thereof.
 15. The method of claim 1 wherein the dielectriclayer comprises a buried oxide layer having a thickness of at leastabout 10 nanometer thick, such as between about 10 nanometers and about10,000 nanometers, between about 10 nanometers and about 5,000nanometers, or between about 100 nanometers and about 400 nanometers.16. The method of claim 1 wherein the dielectric layer comprises silicondioxide.
 17. The method of claim 16 wherein the silicon dioxide has athickness of at least about 10 nanometer thick, such as between about 10nanometers and about 10,000 nanometers, between about 10 nanometers andabout 5,000 nanometers, or between about 100 nanometers and about 400nanometers.
 18. The method of claim 1 further comprising heating thebonded structure at a temperature and for a duration sufficient tostrengthen the bond between the dielectric layer of the semiconductordonor structure and the semiconductor oxide on the front surface of thesingle semiconductor handle substrate.
 19. The method of claim 1 whereinthe single crystal semiconductor donor substrate comprises an ionimplanted damage layer.
 20. The method of claim 19 further comprisingmechanically cleaving the bonded structure at the ion implanted damagelayer of the single crystal semiconductor donor substrate to therebyprepare a cleaved structure comprising the single crystal semiconductorhandle substrate, the semiconductor oxide layer, the dielectric layer incontact with the semiconductor oxide layer, and a single crystalsemiconductor device layer with the dielectric layer.
 21. The method ofclaim 20 further comprising heating the cleaved structure at atemperature and for a duration sufficient to strengthen the bond betweenthe single crystal semiconductor device layer and the single crystalsemiconductor handle substrate.